[Skip to main content](#main-content) [OpenNash Jobs](https://jobs.opennash.com/) [Hiring report](/reports/hiring/) · [All KLA jobs](https://jobs.opennash.com/companies/kla/) · [Search jobs](/search/) KLA · Milpitas, CA # Sr. Mechanical Engineering Manager — Vacuum Systems Milpitas, CA Manager or lead $181,000.00 - $307,700.00 Annually Skilled Trades & Maintenance Listed on KLA’s official careers site. Posted October 5, 2026. Check that it is still open and apply there. [Apply on KLA’s careers site →](https://kla.wd1.myworkdayjobs.com/Search/job/Milpitas-CA/Senior-Mechanical-Engineering-Manager---EUV-Source-Mechanical-Development_2634018) [OpenNash Jobs](https://jobs.opennash.com/) / [KLA](https://jobs.opennash.com/companies/kla/) / Sr. Mechanical Engineering Manager — Vacuum Systems ## Job description Company Overview KLA is a global leader in diversified electronics for the semiconductor manufacturing ecosystem. Virtually every electronic device in the world is produced using our technologies. No laptop, smartphone, wearable device, voice-controlled gadget, flexible screen, VR device or smart car would have made it into your hands without us. KLA invents systems and solutions for the manufacturing of wafers and reticles, integrated circuits, packaging, printed circuit boards and flat panel displays. The innovative ideas and devices that are advancing humanity all begin with inspiration, research and development. KLA focuses more than average on innovation and we invest 15% of sales back into R&D. Our expert teams of physicists, engineers, data scientists and problem-solvers work together with the world’s leading technology providers to accelerate the delivery of tomorrow’s electronic devices. Life here is exciting and our teams thrive on tackling really hard problems. There is never a dull moment with us. Group/Division With over 40 years of semiconductor process control experience, chipmakers around the globe rely on KLA to ensure that their fabs ramp next-generation devices to volume production quickly and cost-effectively. Enabling the movement towards advanced chip design, KLA's Global Products Group (GPG), which is responsible for creating all of KLA’s metrology and inspection products, is looking for the best and the brightest research scientist, software engineers, application development engineers, and senior product technology process engineers. The RAPID division is the world leading provider of reticle inspection solutions for the semiconductor industry. The company provides inspection solutions to both the mask shops and the semiconductor fabs to ensure that lithography yields are consistently high thus enabling cost-effective manufacturing. Job Description/Preferred Qualifications ### Job Description The Advanced Technology of RAPID Division is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next-generation EUV light source in the cutting-edge reticle inspection products. This role leads a multidisciplinary mechanical team delivering precision hardware operating in extreme environments including high vacuum, high-power laser, thermal transients, precision opto-mechanics, and precision motion mechanisms. ### Responsibilities Lead and develop a high-performing mechanical engineering team; set technical direction, priorities, and execution plans to deliver on schedule, cost, and quality. Own mechanical system architecture and delivery for EUV source subsystems including: vacuum chambers and ultra-clean/UHV-compatible hardware; laser/mechanical integration and beam delivery mechanical packaging; collector mirror mounting/alignment mechanisms; plasma target delivery hardware; precision motion components; gas delivery mechanical interfaces; thermal management and structural dynamics. Drive rigorous design review and release discipline, including requirements definition, tolerance analysis, validation/qualification planning, and documentation quality. Partner closely with Technology, Optics, Systems, Production Development, Machine Controls, Manufacturing and Service organizations to improve cost, performance, manufacturability, reliability, and serviceability. Lead root-cause analysis and corrective actions for complex subsystem issues; implement design improvements that increase availability and uptime. Manage supplier technical engagement for precision parts and subassemblies, including vendor selection, qualification, and issue resolution. Embed safety-by-design into mechanical solutions and enable people/machine safety service/production tooling (jigs, fixtures, alignment tools, handling/lifting concepts). Occasional domestic/international travels may be required to support build/validation and customer-site readiness. ### Preferred Qualifications Experience with EUV-adjacent source or illumination subsystems, high-power laser-integrated hardware, or precision opto-mechanical alignment systems. Experience with cryogenic mechanisms and vacuum feedthroughs/seals designed for reliability and maintainability. Track record of production transfer and sustaining engineering support (tooling, procedures, and field escalation readiness). ### Minimum Qualifications B.S. in Mechanical Engineering (M.S. preferred) or equivalent related discipline. 10+ years of experience developing complex hardware/capital equipment (semiconductor tools, precision vacuum systems, opto-mechanical equipment, aerospace-grade mechanisms, or similar). 5+ years of people management experience leading engineers through concept-to-release development. Demonstrated expertise in multiple of: vacuum/UHV design, precision mechanisms, rotating machinery/air bearings, thermal-structural design, vibration/dynamics, contamination-aware mechanical design, and design-for-manufacturability/serviceability. Strong cross-functional communication and leadership skills; ability to drive alignment across technical stakeholders and suppliers. ### Base Pay Range $181,000.00 - $307,700.00 Annually Primary Location: USA-CA-Milpitas-KLA KLA’s total rewards package for employees may also include participation in performance incentive programs and eligibility for additional benefits including but not limited to: medical, dental, vision, life, and other voluntary benefits, 401(K) including company matching, employee stock purchase program (ESPP), student debt assistance, tuition reimbursement program, development and career growth opportunities and programs, financial planning benefits, wellness benefits including an employee assistance program (EAP), paid time off and paid company holidays, and family care and bonding leave. Interns are eligible for some of the benefits listed. Our pay ranges are determined by role, level, and location. The range displayed reflects the pay for this position in the primary location identified in this posting. Actual pay depends on several factors, including state minimum pay wage rates, location, job-related skills, experience, and relevant education level or training. We are committed to complying with all applicable federal and state minimum wage requirements where applicable. If applicable, your recruiter can share more about the specific pay range for your preferred location during the hiring process. KLA is proud to be an Equal Opportunity Employer. We will ensure that qualified individuals with disabilities are provided reasonable accommodation to participate in the job application or interview process, to perform essential job functions, and to receive other benefits and privileges of employment. Please contact us at talent.acquisition@kla.com or at +1-408-352-2808 to request accommodation. Be aware of potentially fraudulent job postings or suspicious recruiting activity by persons that are currently posing as KLA employees. KLA never asks for any financial compensation to be considered for an interview, to become an employee, or for equipment. Further, KLA does not work with any recruiters or third parties who charge such fees either directly or on behalf of KLA. Please ensure that you have searched KLA’s Careers website for legitimate job postings. KLA follows a recruiting process that involves multiple interviews in person or on video conferencing with our hiring managers. If you are concerned that a communication, an interview, an offer of employment, or that an employee is not legitimate, please send an email to talent.acquisition@kla.com to confirm the person you are communicating with is an employee. We take your privacy very seriously and confidentially handle your information. ## At a glance - Posted by the employer: Oct 5, 2026 - First seen by OpenNash: Jul 10, 2026 - Last checked: Oct 17, 2026 - Listed for: 99 days - Location: Milpitas, CA - Pay: $181,000.00 - $307,700.00 Annually[Apply on KLA’s careers site →](https://kla.wd1.myworkdayjobs.com/Search/job/Milpitas-CA/Senior-Mechanical-Engineering-Manager---EUV-Source-Mechanical-Development_2634018) ## More jobs at KLA ### [Hardware Project Manager (Opto-Mechanical focus)](https://jobs.opennash.com/companies/kla/jobs/6273c45322166132081d/) Milpitas, CA ### [Manufacturing Engineer (Precision Mechanical)](https://jobs.opennash.com/companies/kla/jobs/06ce38f5b3700cd52d19/) Milpitas, CA ### [Sr Mechanical Engineer](https://jobs.opennash.com/companies/kla/jobs/9aa7115926a3b12b3db9/) Milpitas, CA ## Similar jobs at other companies ### [Integrated Power Systems (IPS) COLUMBIA Class Electrical/Mechanical Systems Engineering - 2027 Engineering Summer Internship](https://jobs.opennash.com/companies/general-dynamics/jobs/2e145e7a9a556a7e7cfd/) General Dynamics · Groton, CT, US ### [Mechanical, Structures, and Systems - COLUMBIA - 2027 Engineering Summer Internship](https://jobs.opennash.com/companies/general-dynamics/jobs/f10c6f82c8e35bd734d0/) General Dynamics · Groton, CT, US ### [Mechanical Systems Engineer Sr](https://jobs.opennash.com/companies/lockheed-martin/jobs/6ff147ca1c0b3a2ed16c/) Lockheed Martin · Huntsville, AL ### [Principal Opto-Mechanical Engineer in Merrimack, New Hampshire, United States | Engineering & Technology at BAE Systems](https://jobs.opennash.com/companies/bae-systems/jobs/3770d48ed32cedf7357c/) BAE Systems · Merrimack, New Hampshire, United States ### [Manager, Mechanical Systems Engineering, DCE - Mechanical Products & Services](https://jobs.opennash.com/companies/amazon/jobs/e977e0f3584df390eecf/) Amazon · US, TX, Austin OpenNash lists jobs from employers’ own careers sites and does not handle applications. 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